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JIS H 0613:1978 (R2014)
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JIS H 0613:1978 (R2014)
Visual inspection for sliced and lapped silicon wafersMore info
| Author | JSA |
|---|---|
| Editor | JSA |
| Document type | Standard |
| Format | File |
| Confirmation date | 2014-10-20 |
| ICS | 29.045 : Semiconducting materials
77.120.99 : Other non-ferrous metals and their alloys |
| Number of pages | 4 |
| Year | 1970 |
| Document history | |
| Country | Japan |
| Keyword | JIS 0613;0613;JIS H 0613-1978 |