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BS IEC 62047-32:2019

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BS IEC 62047-32:2019

Semiconductor devices. Micro-electromechanical devices - Test method for the nonlinear vibration of MEMS resonators

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Author BSI
Editor BSI
Document type Standard
Format File
EAN ISBN 978 0 580 97389 5
ICS 31.080.99 : Other semiconductor devices
Number of pages 22
Cross references IEC 62047-32:2019
Year 2019
Country United Kingdom