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JIS C 5630-1:2017
Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions
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Author | JSA |
---|---|
Editor | JSA |
Document type | Standard |
Format | File |
ICS | 31.080.99 : Other semiconductor devices
|
Number of pages | 38 |
Replace | JIS C 5630-1 (2008-03-20) |
Cross references | IEC 62047-1 (2016-01), MOD
|
Year | 2017 |
Document history | JIS C 5630-1 (2017-03-21) |
Country | Japan |
Keyword | JIS C 5630;JIS 5630;5630 |