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JIS C 5630-1:2017

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JIS C 5630-1:2017

Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions

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Author JSA
Editor JSA
Document type Standard
Format File
ICS 31.080.99 : Other semiconductor devices
Number of pages 38
Replace JIS C 5630-1 (2008-03-20)
Cross references IEC 62047-1 (2016-01), MOD
Year 2017
Document history JIS C 5630-1 (2017-03-21)
Country Japan
Keyword JIS C 5630;JIS 5630;5630