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PD IEC/TS 62622:2012
Nanotechnologies. Description, measurement and dimensional quality parameters of artificial gratings
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Author | BSI |
---|---|
Editor | BSI |
Document type | Standard |
Format | File |
EAN ISBN | 978 0 580 80384 0 |
ICS | 07.030 : Physics. Chemistry
07.120 : Nanotechnologies |
Number of pages | 44 |
Cross references | IEC TS 62622:2012
|
Year | 2013 |
Country | United Kingdom |
Keyword | PD IEC/TS 62622 ; PDIEC/TS62622 ; PD IECTS 62622 ; PDIEC/TS 62622 ; PD IEC/TS62622 |