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PD IEC/TS 62622:2012

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PD IEC/TS 62622:2012

Nanotechnologies. Description, measurement and dimensional quality parameters of artificial gratings

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Author BSI
Editor BSI
Document type Standard
Format File
EAN ISBN 978 0 580 80384 0
ICS 07.030 : Physics. Chemistry
07.120 : Nanotechnologies
Number of pages 44
Cross references IEC TS 62622:2012
Year 2013
Country United Kingdom
Keyword PD IEC/TS 62622 ; PDIEC/TS62622 ; PD IECTS 62622 ; PDIEC/TS 62622 ; PD IEC/TS62622